A method of making an oxygen sensor, comprising: depositing on a dielectric substrate multiple resistive heater circuits depositing second dielectric layers on the resistive heater circuits depositing conductive intermeshing comb electrodes on the dielectric layer or on the substrate on the opposite side of the heater pattern applying one of n-type or p-type high temperature semiconductors on the comb electrodes bridging the gap between the legs of the combs applying porous dielectric protective layers containing catalytic precious metals on the semic.ġ. A method of using one embodiment of the invention for use as a safety switch is also revealed.ġ. Utilizing multiple units of the device for individual cylinder control of multi-cylinder engines is described. A circuit is proposed to convert the change in resistance to a voltage signal to be used for control algorithms in engine or combustion control. A large step-wise change in the resistance of the element takes place as a result of changes in oxygen content in the exhaust whereby one can determine if the exhaust is rich or lean for use in an engine management or combustion management systems for emissions control. After singulation (dicing), the sensor element is assembled having conductors applied to the contact pads on the element and is packaged in an assembly for introduction to the exhaust stream of a combustion process. The space between the intermeshing electrodes is filled with an n-type or p-type high temperature semiconductor which is covered by a porous protection layer. Intermeshing electrodes are then applied either over the heater pattern/dielectric layers or on the opposite side of the substrate. After singulation (dicing), the sensor element is asse.Ī method of making a sub-miniature “micro-chip” oxygen sensor is provided where multiple sensor elements are applied to a dielectric ceramic substrate consisting of a heater pattern, followed by a dielectric layer. A method of making a sub-miniature “micro-chip” oxygen sensor is provided where multiple sensor elements are applied to a dielectric ceramic substrate consisting of a heater pattern, followed by a dielectric layer.

Kens miniature ic engines